7.) Symptom: Dot skipping
Cause a): The inker Z-height is set too high. A consistent pattern of skipping dots often indicates improper Z-height adjustment. Solution a): Lower the inker Z-height to a setting that yields round dots without any skipping. Related Information: See Inker Set-up Procedure in the inker Operations Manual for detailed instructions. Cause b): Cartridge was not primed correctly and needs to be re-primed (filament inkers only). Solution b): Re-prime cartridge per instructions on cartridge packaging and run a thousand dots on a test wafer. Cause c): Cartridge needle tip is damaged. Solution c): Replace the damaged cartridge with a new one. Cause d): The cartridge needle is clogged with a debris particle (pneumatic inkers only). Solution d): Replace the suspect cartridge with a new one. Return the suspect cartridge to Xandex for test confirmation and possible warranty replacement. Cause e): Air bubble (pneumatic inkers only). Small air bubbles are sometimes present during the first 1,000 dots after initial cartridge priming. Solution e): Run 1,000 dots onto a test wafer. This should eliminate any bubbles that may have been present inside of the cartridge. Cause f): Inking surface is not planar. This can be caused by variations in wafer thickness or if the prober head plate or chuck is tilted slightly relative to perfect horizontal. If the dot skipping only occurs on one side of the wafer, it is most likely due to planarity problems. Solution f): Check the planarity of the prober head plate and chuck. Make planarity adjustments per the prober manufacturers recommended procedure. Cause g): Prober Z stage equipment problem. The stage Z drive assembly photocells may be defective or contaminated with dust (if prober is so equipped). Z stage malfunction can cause the amount of stage travel in the z direction to be non-uniform, resulting in skipped dots. Solution g): Refer to prober manufacturers recommended verification procedure to insure correct operation of the prober Z stage drive and clean, adjust or replace components as necessary. Cause h): Inker equipment problem (pneumatic inkers only). Pneumatic inker shuttle is clogged with dried ink or other debris, or has been used outside the recommended shuttle preventive maintenance period causing inconsistent shuttle motion. Solution h): Perform recommended preventive maintenance on the shuttle using the appropriate shuttle maintenance kit (available from Xandex). Replacement of the shuttle may be required if shuttle has been damaged due to a lack of regular preventive maintenance. Cause i): Inker equipment problem (pneumatic inkers only). Pneumatic controller has not received regular preventive maintenance, resulting in inconsistent shuttle and/or cartridge actuator valve performance. Solution i): Perform recommended preventive maintenance on the controller using the appropriate controller maintenance kit (available from Xandex).
top of page return to list |